申请人:MARUYAMA Ken
公开号:US20120164582A1
公开(公告)日:2012-06-28
A radiation-sensitive composition includes a photoacid generator shown by a general formula (0-1a). Each of R
0
individually represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M
+
represents a monovalent onium cation. A compound is shown by a general formula (0). R represents a substituted or unsubstituted organic group which includes a carbon atom, a hydrogen atom, and an oxygen atom, and which includes at least one ester bond, and M
+
represents a monovalent onium cation.