Compounds that function to provide level or uniform metal deposits are provided. These compounds are particularly useful in providing level copper deposits. Copper plating baths and methods of copper plating using these compounds are also provided. These baths and methods are useful for providing a planarized layer of copper on a substrate having small apertures. The compositions and methods provide complete fill of small apertures with reduced void formation.
提供的化合物具有提供平整或均匀
金属沉积物的功能。这些化合物尤其适用于提供平整的
铜镀层。此外,还提供了使用这些化合物的镀
铜液和镀
铜方法。这些镀
铜液和镀
铜方法适用于在具有小孔的基底上形成平面
铜层。这些组合物和方法可完全填充小孔,减少空隙的形成。