PATTERN FORMING METHOD, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, MANUFACTURING METHOD OF ELECTRONIC DEVICE, ELECTRONIC DEVICE AND COMPOUND
申请人:FUJIFILM CORPORATION
公开号:US20160070167A1
公开(公告)日:2016-03-10
There is provided a pattern forming method comprising (i) a step of forming a film containing an actinic ray-sensitive or radiation-sensitive resin composition containing (A) a compound represented by the specific formula, (B) a compound different from the compound (A) and capable of generating an acid upon irradiation with an actinic ray or radiation, and (P) a resin that does not react with the acid generated from the compound (A) and is capable of decreasing the solubility for an organic solvent-containing developer by the action of the acid generated from the compound (B), (ii) a step of exposing the film, and (iii) a step of developing the exposed film by using an organic solvent-containing developer to form a negative pattern; the actinic ray-sensitive or radiation-sensitive resin composition above; a resist film using the composition.
提供了一种图案形成方法,包括(i)形成一种薄膜,其中包含一种感光树脂组成物,该组成物包含(A)一种特定化学式代表的化合物,(B)一种不同于化合物(A)的化合物,在接受光辐射后能够产生酸,并且(P)一种树脂,该树脂不会与从化合物(A)产生的酸发生反应,并且能够通过来自化合物(B)产生的酸的作用降低有机溶剂含有的显影剂的溶解度,(ii)曝光薄膜,(iii)使用有机溶剂含有的显影剂对曝光后的薄膜进行显影,形成负图案;上述感光树脂组成物;使用该组成物的抗蚀膜。