FLUOROCOPOLYMER, PROCESS FOR PRODUCING THE SAME, AND RESIST COMPOSITION CONTAINING THE SAME
申请人:ASAHI GLASS COMPANY LTD.
公开号:EP1657264A1
公开(公告)日:2006-05-17
To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer.
A fluorinated copolymer having units derived from a monomer unit formed by cyclopolymerization of a fluorinated diene represented by the following formula (1) :
CF2=CFCH2CH(CH2C(CF3)2(OR1)) CH2CH=CH2 (1)
wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, which may have an etheric oxygen atom, an alkoxycarbonyl group having at most 6 carbon atoms, or CH2R2 (wherein R2 is an alkoxycarbonyl group having at most 6 carbon atoms), and units derived from a monomer unit formed by cyclopolymerization of another monomer or units derived from a monomer unit formed by polymerization of an acrylic monomer, and a resist composition having such a fluorinated copolymer as a base polymer.
提供一种具有官能团且在宽波长区域具有高透明度的含氟聚合物,以及一种包含该含氟聚合物的抗蚀剂组合物。
一种含氟共聚物,其单元来自由下式(1)代表的含氟二烯环聚合形成的单体单元:
cf2=cfch2ch(ch2c(cf3)2(or1)) ch2ch=ch2 (1)
其中 R1 是氢原子、具有至多 20 个碳原子的烷基(可具有一个醚氧原子)、具有至多 6 个碳原子的烷氧羰基或 CH2R2(其中 R2 是具有至多 6 个碳原子的烷氧羰基),以及由另一种单体环聚合形成的单体单元衍生的单元或由丙烯酸单体聚合形成的单体单元衍生的单元,以及以这种含氟共聚物为基础聚合物的抗蚀剂组合物。