To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer. A fluorinated copolymer having units derived from a monomer unit formed by cyclopolymerization of a fluorinated diene represented by the following formula (1):
CF
2
═CFCH
2
CH(CH
2
C(CF
3
)
2
(OR
1
))CH
2
CH═CH
2
(1)
wherein R
1
is a hydrogen atom, an alkyl group having at most 20 carbon atoms, which may have an etheric oxygen atom, an alkoxycarbonyl group having at most 6 carbon atoms, or CH
2
R
2
(wherein R
2
is an alkoxycarbonyl group having at most 6 carbon atoms), and units derived from a monomer unit formed by cyclopolymerization of another monomer or units derived from a monomer unit formed by polymerization of an acrylic monomer, and a resist composition having such a fluorinated copolymer as a base polymer.
提供一种具有官能团且在宽波长区域具有高透明度的含
氟聚合物,以及一种包含该含
氟聚合物的抗蚀剂组合物。一种含
氟共聚物,其单元来自由下式(1)表示的含
氟二烯环聚合形成的单体单元:
CF
2
═CFCH
2
CH(CH
2
C(CF
3
)
2
(或
1
))CH
2
CH═CH
2
(1)
其中 R
1
是氢原子、最多有 20 个碳原子的烷基(其中可能有一个氧原子)、最多有 6 个碳原子的烷氧羰基或 CH
2
R
2
(其中 R
2
是最多具有 6 个碳原子的烷氧羰基)、由另一种单体环聚形成的单体单元衍生的单元或由
丙烯酸单体聚合形成的单体单元衍生的单元,以及以这种含
氟共聚物为基础聚合物的抗蚀剂组合物。