申请人:Wako Pure Chemical Industries, Ltd.
公开号:EP1679361A1
公开(公告)日:2006-07-12
The present invention provides a cleaning agent for a substrate and a cleaning method thereof, which can effectively remove fine particles (particles) present on a surface of substrate or impurities derived from various kinds of metals (metallic impurities), without causing roughness surface of a substrate, in particular, a semiconductor substrate, and without causing corrosion or oxidation of metal wirings, in particular, copper wirings, provided on a surface of substrate, and can further remove at the same time a carbon defect present on a surface of substrate, without removing a metal corrosion inhibitor - Cu film, in particular, a Cu-BTA film.
The present invention provides a cleaning agent for a substrate comprising [I] an organic acid having at least one carboxyl group and/or [II] a complexing agent, and [III] an organic solvent selected from the group consisting of (1) monohydric alcohols, (2) alkoxyalcohols, (3) glycols, (4) glycol ethers, (5) ketones and (6) nitriles, and a cleaning method for a surface of substrate, which comprises the surface of substrate is treated with said cleaning agent.
本发明提供了一种用于基板的清洗剂及其清洗方法,该清洗剂可有效去除存在于基板表面的细小颗粒(微粒)或来自各种金属的杂质(金属杂质),而不会导致基板(尤其是半导体基板)表面粗糙,也不会导致设置在基板表面的金属线(尤其是铜线)腐蚀或氧化,并可进一步同时去除存在于基板表面的碳缺陷,而不会去除金属缓蚀剂-Cu膜(尤其是Cu-BTA膜)。
本发明提供了一种用于基材的清洗剂,包括[I]具有至少一个羧基的有机酸和/或[II]络合剂,以及[III]选自以下组别的有机溶剂:(1)一元醇、(2)烷氧基乙醇、(3)乙二醇、(4)乙二醇醚、(5)酮和(6)腈。