A pellicle that excellently transmits ultraviolet rays and, particularly, vacuum ultraviolet rays, does not lose the film thickness thereof that stems from the photolysis and, hence, exhibits excellent light resistance. The pellicle is obtained by using, as a material of pellicle film, an impurity-free organic polymer obtained by treating an organic polymer to remove at least a portion of at least any one of, preferably, a majority portion of trace amount-metal components, high molecular components and incomplete molecular structure components contained in the organic polymer. The invention further provides a method of preparing a pellicle.
                            一种能很好地透过紫外线,特别是真空紫外线,且不会因光解而失去薄膜厚度,因而具有优异耐光性的胶粒。本发明提供了一种不含杂质的有机聚合物,通过处理有机聚合物,除去有机聚合物中含有的微量
金属成分、高分子成分和不完全分子结构成分中的至少任一成分(最好是大部分),得到无杂质有机聚合物,作为胶粒膜的材料。本发明进一步提供了一种制备胶粒的方法。