A mixture and a method comprising same for etching a dielectric material from a layered substrate are disclosed herein. Specifically, in one embodiment, there is provided a mixture for etching a dielectric material in a layered substrate comprising an unsaturated oxygenated fluorocarbon. The mixture of the present invention may be contacted with a layered substrate comprising a dielectric material under conditions sufficient to at least partially react with and remove at least a portion of the dielectric material. In another embodiment of the present invention, there is provided a method for making an unsaturated oxygenated fluorocarbon.
本文公开了一种用于蚀刻层状基底中的介电材料的混合物和包含该混合物的方法。具体来说,在一个实施方案中,提供了一种用于蚀刻层状基底中的介电材料的混合物,该基底由不饱和含氧碳
氟化合物组成。本发明的混合物可在足以至少部分与介电材料反应并去除至少部分介电材料的条件下与包含介电材料的分层基底接触。在本发明的另一个实施方案中,提供了一种制造不饱和含氧碳
氟化合物的方法。