COMPOUND, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, RESIST FILM, AND PATTERN FORMATION METHOD, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE USING SAME, AND ELECTRONIC DEVICE
申请人:FUJIFILM CORPORATION
公开号:US20160024005A1
公开(公告)日:2016-01-28
There is provided an actinic ray-sensitive or radiation-sensitive resin composition containing a compound represented by the following formula (1) or (2), and the formula (1) and (2) are defined as herein,
and a resist film comprising the actinic ray-sensitive or radiation-sensitive resin composition, and a pattern forming method comprising a step of exposing the resist film, and a step of developing the exposed film, and a method for manufacturing an electronic device, comprising the pattern forming method, and an electronic device manufactured by the manufacturing method of an electronic device.
提供了一种包含下列式子(1)或(2)所代表的化合物的光致射线敏感或辐射敏感的树脂组合物,其中式(1)和(2)的定义如本文所述,以及包括该光致射线敏感或辐射敏感的树脂组合物的光阻膜,以及包括曝光光阻膜的步骤和显影曝光膜的步骤的图案形成方法,以及包括图案形成方法的制造电子装置的方法,以及由电子装置的制造方法制造的电子装置。