申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US11042090B2
公开(公告)日:2021-06-22
The present invention provides a composition for forming an organic film, containing a polymer compound having one or more of repeating units shown by the general formulae (1) to (4) and an organic solvent containing one or more compounds selected from propylene glycol esters, ketones, and lactones, with a total concentration of more than 30 wt % with respect to the whole organic solvent. There can be provided a composition capable of forming an organic film that can be easily removed, together with a silicon residue modified by dry etching, in a wet manner with a removing liquid harmless to a semiconductor apparatus substrate and an organic resist underlayer film required in the patterning process, for example, an ammonia aqueous solution containing hydrogen peroxide called SC1, which is commonly used in the semiconductor manufacturing process.
本发明提供了一种用于形成有机薄膜的组合物,该组合物含有具有通式(1)至(4)所示的一种或多种重复单元的聚合物化合物,以及一种有机溶剂,该有机溶剂含有一种或多种选自丙二醇酯、酮和内酯的化合物,相对于整个有机溶剂的总浓度超过 30 wt%。可以提供一种组合物,该组合物能够用一种对半导体设备基底和图案化工艺中所需的有机抗蚀剂底层膜无害的去除液,例如半导体制造工艺中常用的一种名为 SC1 的含有过氧化氢的氨水溶液,以湿法形成一种有机膜,该有机膜可以与通过干法蚀刻改性的硅残留物一起容易地去除。