申请人:ADEKA CORPORATION
公开号:US11036135B2
公开(公告)日:2021-06-15
Provided are: a curable composition having excellent photolithographic properties and resin elution properties; a cured product of the curable composition; and a curing method of the curable composition. The curable composition is characterized by including: (A) at least one selected from the group consisting of a water-soluble polyfunctional (meth)acrylates and water-soluble polyfunctional (meth)acrylamides; and (B) a photosensitive group-containing water-soluble polymer. The water-soluble polyfunctional (meth)acrylates are preferably compounds represented by Formula (I) below, and the water-soluble polyfunctional (meth)acrylamides are preferably compounds represented by Formula (II) below. In Formulae (I) and (II), R1 represents a hydrogen atom, a methyl group, or a halogen atom; X1 represents an alkylene group having 1 to 6 carbon atoms that is optionally substituted with a hydroxy group; A represents an n-valent organic group; R11 represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; m represents a number of 1 to 30; n represents a number of 2 to 12; and t represents a number of 2 to 12.
本文提供了:一种具有优异光刻性能和树脂洗脱性能的可固化组合物;该可固化组合物的固化产物;以及该可固化组合物的固化方法。该可固化组合物的特征是包括:(A) 至少一种选自水溶性多官能度(甲基)丙烯酸酯和水溶性多官能度(甲基)丙烯酰胺组成的组;(B) 含光敏基团的水溶性聚合物。水溶性多官能度(甲基)丙烯酸酯最好是下式(I)表示的化合物,水溶性多官能度(甲基)丙烯酰胺最好是下式(II)表示的化合物。在式(I)和(II)中,R1 代表氢原子、甲基或卤素原子;X1 代表具有 1 至 6 个碳原子并可选被羟基取代的亚烷基;A 代表正价有机基团;R11 代表氢原子或具有 1 至 4 个碳原子的烷基;m 代表 1 至 30 的数字;n 代表 2 至 12 的数字;t 代表 2 至 12 的数字。