The invention provides curable compositions for transfer materials suited for nanoimprinting, which have very high transfer properties in a nanoimprinting process, show high selectivity in dry etching rate between by argon gas and by oxygen gas, and can be fabricated into fine patterns with high throughput. The curable composition for transfer materials includes a compound (A) having at least one skeleton selected from Formulae (1) to (3) below, and a (meth)acryloyl group:
本发明提供了适用于纳米压印的转印材料可固化组合物,该组合物在纳米压印工艺中具有极高的转印性能,在
氩气和
氧气的干蚀刻率中显示出高选择性,并能以高产量制成精细图案。用于转印材料的可固化组合物包括一种化合物 (A),其至少有一个选自下式 (1) 至 (3) 的骨架和一个 (甲基)
丙烯酰基: