申请人:SUMITOMO CHEMICAL COMPANY, LIMITED
公开号:US20190315684A1
公开(公告)日:2019-10-17
Described are a salt and a resist composition capable of producing a resist pattern with satisfactory line edge roughness (LER). The salt is represented by formula (I):
In formula (I), R
1
, R
2
, R
3
, R
4
and R
5
each independently represent a halogen atom or a perfluoroalkyl group having 1 to 6 carbon atoms, R
6
, R
7
and R
8
each independently represent a halogen atom, a hydroxy group, a fluorinated alkyl group having 1 to 6 carbon atoms or an alkyl group having 1 to 12 carbon atoms, and —CH
2
— included in the alkyl group may be replaced by —O— or —CO—, m5 represents an integer of 1 to 5, m6 represents an integer of 0 to 3, m7 represents an integer of 0 to 3, m8 represents an integer of 0 to 4, and AI
−
represents an organic anion.
描述了一种盐和抗蚀剂组合物,能够产生满意的线边粗糙度(LER)的抗蚀图案。该盐由公式(I)表示:在公式(I)中,R1、R2、R3、R4和R5各自独立地表示卤素原子或具有1至6个碳原子的全氟烷基,R6、R7和R8各自独立地表示卤素原子、羟基、具有1至6个碳原子的氟化烷基或具有1至12个碳原子的烷基,并且包含在烷基中的—CH2—可以被—O—或—CO—所取代,m5表示1至5的整数,m6表示0至3的整数,m7表示0至3的整数,m8表示0至4的整数,AI-表示有机阴离子。