Photoacid generator salts comprising photoactive cationic moieties and segmented, highly fluorinated-hydrocarbon anionic moieties are disclosed which provide high photoacid strength and can be tailored for solubility and polarity. The present invention further relates to photoacid generators as they are used in photoinitiated acid-catalyzed processes for uses such as photoresists for microlithography and photopolymerization.
本发明揭示了包括光敏阳离子基团和分段高度
氟化-碳氢阴离子基团的光酸发生剂盐,其提供高光酸强度并可为溶解度和极性进行定制。本发明进一步涉及光酸发生剂,因为它们用于光引发的酸催化过程,用于微影制造和光聚合等用途的光刻胶。