Nield, E.; Stephens, R.; Tatlow, J. C., Journal of the Chemical Society
作者:Nield, E.、Stephens, R.、Tatlow, J. C.
DOI:——
日期:——
Photoresist composition for deep ultraviolet lithography comprising a mixture of photoactive compounds
申请人:——
公开号:US20030235782A1
公开(公告)日:2003-12-25
The present invention relates to a novel photoresist composition that can be developed with an aqueous alkaline solution, and is capable of being imaged at exposure wavelengths in the deep ultraviolet. The invention also relates to a process for imaging the novel photoresist as well as novel photoacid generators.