Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193nm (ArF) imaging radiation.
不含
氟的光酸发生剂和含有不含
氟光酸发生剂的光阻组合物作为PF
OS/P
FAS光酸发生剂含有光阻的替代品。这些光酸发生剂的特点是含有不含
氟的杂环
磺酸盐阴离子成分。光酸发生剂最好包含一个离子阳离子成分,更好地是一个磺
酚阳离子成分。光阻组合物最好包含酸敏感成像
聚合物。这些组合物在利用193nm(ArF)成像辐射形成材料图案方面特别有用。