The present invention relates to a novel (meth)acrylamide compound represented by the general formula (1), a (co)polymer of the (meth)acrylamide compound, and a chemically amplified photosensitive resin composition composed of the polymer and a photoacid generator. In the formula, R
1
represents a hydrogen atom or a methyl group; R
2
represents an acid-decomposable group; and R
3
to R
6
independently represent a hydrogen atom, a halogen atom or an alkyl group having 1 to 4 carbon atoms.
本发明涉及一种由通式(1)表示的新型(甲基)
丙烯酰胺化合物,该化合物的(共)聚合物,以及由聚合物和光酸发生剂组成的
化学增感光敏
树脂组合物。在该式中,R1代表氢原子或甲基基团;R2代表可分解酸基团;R3至R6独立地代表氢原子、卤素原子或具有1至4个碳原子的烷基基团。