申请人:Rohm and Haas Electronic Materials LLC
公开号:US20210341840A1
公开(公告)日:2021-11-04
Coating compositions comprise: a curable compound comprising: a core chosen from a C
6
carbocyclic aromatic ring, a C
2-5
heterocyclic aromatic ring, a C
9-30
fused carbocyclic aromatic ring system, a C
4-30
fused heterocyclic aromatic ring system, C
1-20
aliphatic, and C
3-20
cycloaliphatic, and three or more substituents of formula (1)
wherein at least two substituents of formula (1) are attached to the aromatic core; and wherein: Ar
1
is chosen from a C
6
carbocyclic aromatic ring, a C
2-5
heterocyclic aromatic ring, a C
9-30
fused carbocyclic aromatic ring system, and a C
4-30
fused heteroocyclic aromatic ring system; Z is a substituent independently chosen from OR
1
, protected hydroxyl, carboxyl, protected carboxyl, SR
1
, protected thiol, —O—C(═O)—C
1-6
alkyl, halogen, and NHR
2
; wherein each R
1
is independently chosen from H, C
1-10
alkyl, C
2-10
unsaturated hydrocarbyl, and C
5-30
aryl; each R
2
is independently chosen from H, C
1-10
alkyl, C
2-10
unsaturated hydrocarbyl, C
5-30
aryl, C(═O)—R
1
, and S(═O)
2
—R
1
; x is an integer from 1 to the total number of available aromatic ring atoms in Ar
1
; and * denotes the point of attachment to the core; provided that no substituents of formula (1) are in an ortho position to each other on the same aromatic ring of the core; a polymer; and one or more solvents, wherein the total solvent content is from 50 to 99 wt % based on the coating composition. Coated substrates formed with the coating compositions and methods of forming electronic devices using the compositions are also provided. The compositions, coated substrates and methods find particular applicability in the manufacture of semiconductor devices.