A deep ultraviolet absorbent comprising at least one compound having one or more glycidyl groups in the molecule and at least one anthracene derivative, and a solvent capable of dissolving these compounds is effective for preventing reflection of deep ultraviolet light from a substrate during formation of resist pattern, resulting in forming ultra-fine patterns without causing notching and halation.
一种深紫外吸收剂,包括至少一种分子中含有一个或多个环氧
丙烷基团和至少一种
蒽衍
生物的化合物,并且具有溶解这些化合物的溶剂。在形成光刻图案期间,该深紫外吸收剂能够有效地防止底片反射深紫外光,从而形成超细图案而不会导致缺口和光晕。