A radiation-sensitive composition contains (A) a low-molecular-weight compound having one or more acid-dissociable groups which decompose by the action of an acid to enhance solubility in an alkaline developing solution and one or more radiation-sensitive acid-generating groups which generate an acid upon application of an active ray or radiation per molecule, and having a polystyrene-reduced number-average molecular weight (Mn) measured by gel permeation chromatography (GPC) of 500 to 4,000, and (B) a solvent.
辐射敏感性组合物含有 (A) 低分子量化合物,该化合物具有一个或多个酸可分解基团,这些基团在酸的作用下分解,以提高在碱性显影液中的溶解度,同时还具有一个或多个辐射敏感性酸生成基团,这些基团在使用活性射线或辐射时生成酸,且每个分子的聚
苯乙烯还原平均分子量(Mn)经凝胶渗透色谱法(
GPC)测定为 500 至 4000;以及 (B) 溶剂。