A surface treatment composition according to the present invention is a surface treatment composition having a pH of lower than 7 and used for treating the surface of a polished object to be polished having a layer containing tungsten, and the surface treatment composition contains a tungsten etching inhibitor and water, wherein the tungsten etching inhibitor is a compound containing a monocyclic or fused polycyclic aromatic hydrocarbon ring having two or more substituents, and the substituents contain at least a nitrogen-containing group and an anionic group.
根据本发明,一种表面处理组合物是一种 pH 值低于 7 的表面处理组合物,用于处理具有含
钨层的待抛光物体的表面,该表面处理组合物含有
钨蚀刻
抑制剂和
水,其中
钨蚀刻
抑制剂是一种化合物,含有单环或融合多环
芳香烃环,该环具有两个或多个取代基,取代基至少含有一个含氮基团和一个阴离子基团。