COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND POLYMER
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20200387071A1
公开(公告)日:2020-12-10
A composition for forming an organic film contains a polymer having a repeating unit shown by formula (1A) as a partial structure, and an organic solvent, where AR
1
and AR
2
represent a benzene ring or naphthalene ring optionally with a substituent; W
1
represents any in formula (1B), and the polymer optionally contains two or more kinds of W
1
; W
2
represents a divalent organic group having 1 to 80 carbon atoms; R
1
represents a monovalent organic group having 1 to 10 carbon atoms and an unsaturated bond; and R
2
represents a monovalent organic group having 6 to 20 carbon atoms and one or more aromatic rings. This invention provides: an organic film composition which enables excellent film formability, high etching resistance, and excellent twisting resistance without impairing the resin-derived carbon content, and which contains less outgassing-causing sublimation component; a patterning process using the composition; and a polymer suitable for the composition.
COMPOSITION FOR FORMING ORGANIC FILM, SUBSTRATE FOR MANUFACTURING SEMICONDUCTOR DEVICE, METHOD FOR FORMING ORGANIC FILM, PATTERNING PROCESS, AND POLYMER
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20210003920A1
公开(公告)日:2021-01-07
A composition for forming an organic film contains a polymer having a partial structure shown by the following general formula (1) as a repeating unit, and an organic solvent. Each of AR1 and AR2 represents a benzene ring or naphthalene ring which optionally have a substituent; W
1
represents a particular partial structure having a triple bond, and the polymer optionally contains two or more kinds of W
1
; and W
2
represents a divalent organic group having 6 to 80 carbon atoms and at least one aromatic ring. This invention provides: a polymer curable even under film formation conditions in an inert gas and capable of forming an organic film which has not only excellent heat resistance and properties of filling and planarizing a pattern formed in a substrate, but also favorable film formability onto a substrate with less sublimation product; and a composition for forming an organic film, containing the polymer.
COATING-TYPE COMPOSITION FOR FORMING ORGANIC FILM, PATTERNING PROCESS, POLYMER, AND METHOD FOR MANUFACTURING POLYMER
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US20210278766A1
公开(公告)日:2021-09-09
The present invention provides a. coating-type composition for forming an. organic film containing: a polymer having a structure shown by the following general formula (1) as a partial structure; and an organic solvent, where in the formula (1), ring structures Ar1 and Ar2 represent a benzene rive or a naphthalene ring optionally having a substituent, and W
1
represents an aryl croup having 6 to 30 carbon atoms and optionally having a substituent. This provides a coating-type composition for forming an organic film that can. form an organic film having high pattern-curving resistance and high dry-etching resistance, the composition being excellent in solvent solubility and having a low generation of defects.