CALIXARENE COMPOUND AND PHOTORESIST COMPOSITION COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20130157195A1
公开(公告)日:2013-06-20
A molecular glass compound includes (A) a tetrameric reaction product of a specific aromatic compound having at least one hydroxy group, and a specific polycyclic or fused polycyclic aromatic aldehyde; and (B) an acid-removable protecting group as an adduct with the hydroxy group of the aromatic compound and/or a hydroxy group of the polycyclic or fused polycyclic aromatic aldehyde. A photoresist composition including the molecular glass compound, and a coated substrate including a layer of the photoresist composition are also disclosed.
CALIXARENE AND PHOTORESIST COMPOSITION COMPRISING SAME
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20130078569A1
公开(公告)日:2013-03-28
A molecular glass compound comprises a vinyl ether adduct of an aromatic vinyl ether of formula C(R
1
)
2
═C(R
2
)—O-(L)
n
-Ar
1
, and a calix[4]arene, wherein R
1
and R
2
are each independently a single bond, H, C
1-20
alkyl, C
1-20
haloalkyl, C
6-20
aryl, C
6-20
haloaryl, C
7-20
aralkyl, or C
7-20
haloaralkyl, L is a C
1-20
linking group, n is 0 or 1, and Ar
1
is a halo-containing monocyclic, or substituted or unsubstituted polycyclic or fused polycyclic C
6-20
aromatic-containing moiety, wherein R
1
and R
2
are connected to Ar
1
when either or both of R
1
and R
2
is a single bond and n is 0. A photoresist, comprising the molecular glass compound, a solvent, and a photoacid generator, a coated substrate, comprising (a) a substrate having one or more layers to be patterned on a surface thereof; and (b) a layer of a photoresist composition over the one or more layers to be patterned, and a method of forming the molecular glass compound, are also disclosed.