A radiation-sensitive resin composition includes a compound shown by a formula (1) in which R
1
represents a divalent hydrocarbon group having 1 to 20 carbon atoms and R
2
represents a hydrogen atom or a monovalent hydrocarbon group having 1 to 20 carbon atoms, or R
1
and R
2
form a heterocyclic structure having 4 to 20 carbon atoms, R
3
represents a monovalent acid-dissociable group, n is an integer from 1 to 6, each of R
4A
, R
4B
, and R
4C
represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms, or R
4A
represents one of an alkyl group having 1 to 4 carbon atoms and a monovalent alicyclic hydrocarbon group having 4 to 20 carbon atoms and R
4B
and R
4C
form a divalent alicyclic hydrocarbon group having 4 to 20 carbon atoms.
一种辐射敏感
树脂组合物包括一个由式(1)表示的化合物,其中R1表示具有1到20个碳原子的二价碳氢基团,R2表示氢原子或具有1到20个碳原子的一价碳氢基团,或者R1和R2形成具有4到20个碳原子的杂环结构,R3表示一价酸解离基团,n是1到6的整数,R4A、R4B和R4C中的每一个表示具有1到4个碳原子的烷基团和具有4到20个碳原子的一价脂环碳氢基团之一,或者R4A表示具有1到4个碳原子的烷基团和具有4到20个碳原子的一价脂环碳氢基团之一,而R4B和R4C形成具有4到20个碳原子的二价脂环碳氢基团。