POLYMER COMPOUND, POSITIVE RESIST COMPOSITION, LAMINATE, AND RESIST PATTERNING PROCESS
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP3127928A1
公开(公告)日:2017-02-08
The present invention provides a polymer compound containing a repeating unit shown by the formula (1c) and one or more repeating units selected from a repeating unit shown by the formula (2) and a repeating unit shown by the formula (3),
wherein Mb+ represents a sulfonium cation shown by the formula (a) or an iodonium cation shown by the formula (b),
This polymer compound is suitable as a base resin of a resist composition capable of forming a resist film that allows pattern formation with extremely high resolution, small LER, and excellent rectangularity.
本发明提供了一种聚合物化合物,它含有式(1c)所示的重复单元和一个或多个重复单元,这些重复单元选自式(2)所示的重复单元和式(3)所示的重复单元、
其中 Mb+ 代表式(a)所示的锍阳离子或式(b)所示的碘阳离子、
这种聚合物化合物适合用作抗蚀剂组合物的基体树脂,这种抗蚀剂组合物能够形成具有极高分辨率、极小 LER 和极佳矩形度的抗蚀剂薄膜。