Method of Synthesizing Siloxane Monomers and Use Thereof
申请人:Paulasaari Jyri
公开号:US20140249326A1
公开(公告)日:2014-09-04
A method for preparation and polymerization of siloxane monomers of Formula I is presented. The synthesis includes the selective reaction between silanol containing unit and alkoxy containing units in the presence of basic catalyst. The siloxane monomers of the invention can be used for preparation of siloxane polymers with good flexibility and cracking threshold, and functional sites, useful for applications requiring low metal content in semiconductor industry.