DIAZORESIN, PHOTORESIST COMPOSITION AND PREPARATION METHOD OF PHOTORESIST COMPOSITION
申请人:BOE Technology Group Co., Ltd.
公开号:EP3081581A1
公开(公告)日:2016-10-19
Diazo-resin-containing photoresist compositions and methods of preparing the same are provided for solving the problem that existing diazo-resins cannot be applied in LCD photoresists because the storage periods of the diazo-resins themselves and the printed boards made thereby are both short due to poor thermal stability of the diazo-resins. The diazo-resins of the present invention have excellent thermal stability and exhibit strong resistance to dry etching when being used in negative photoresists, while high resolution can be achieved. Meanwhile, during exposure, portions of the diazo-resins can crosslink with hydrogen bonds on surface of SiO or SiON film forming a barrier layer or passivation layer, such that the adhesion between the photoresists and the film layer is increased, and the photoresists would not peel during development. Thus, the utilization of tackifiers for enhancing the adhesion between a photoresist and surface of SiO or SiON film before masking can be omitted.
本发明提供了含重氮树脂的光刻胶组合物及其制备方法,以解决现有重氮树脂因热稳定性差而导致其本身和由此制成的印刷电路板的存储期均较短,因而无法应用于液晶显示器光刻胶的问题。本发明的重氮树脂具有极佳的热稳定性,在用于负片光刻胶时具有很强的抗干蚀刻能力,同时还能实现高分辨率。同时,在曝光过程中,部分重氮树脂可在 SiO 或 SiON 薄膜表面以氢键交联,形成阻挡层或钝化层,从而增加光刻胶与薄膜层之间的附着力,使光刻胶在显影过程中不会剥落。因此,在掩膜之前,可以不使用增粘剂来增强光刻胶与 SiO 或 SiON 薄膜表面之间的附着力。