COMPOSITION FOR FORMING UPPER FILM AND METHOD FOR FORMING PHOTORESIST PATTERN
申请人:JSR Corporation
公开号:EP1950610A1
公开(公告)日:2008-07-30
An upper layer-forming composition formed on a photoresist while causing almost no intermixing with the photoresist film and a photoresist patterning method are provided. The upper layer-forming composition is stably maintained without being eluted in a medium such as water during liquid immersion lithography and is easily dissolved in an alkaline developer. The upper layer-forming composition covers a photoresist film for forming a pattern by exposure to radiation. The composition comprises a resin dissolvable in a developer for the photoresist film and a solvent in which the resin is dissolved. The solvent has a viscosity of less than 5.2 x 10-3 Pa·s at 20°C. In addition, the solvent does not cause intermixing of the photoresist film and the upper layer-forming composition. The solvent contains an ether or a hydrocarbon.
本发明提供了一种在光刻胶上形成的上层形成组合物,同时几乎不会造成与光刻胶膜的混合,并提供了一种光刻胶图案化方法。在液浸光刻过程中,上层形成组合物可稳定地保持在水等介质中而不会被洗脱,并且很容易溶解在碱性显影剂中。上层形成组合物覆盖在光刻胶膜上,通过辐射形成图案。该组合物包括一种可溶解于光刻胶膜显影剂中的树脂和一种可溶解树脂的溶剂。溶剂在 20°C 时的粘度小于 5.2 x 10-3 Pa-s。此外,该溶剂不会造成光刻胶膜和上层形成组合物的混合。溶剂含有醚或烃。
Preparation of synthetic rotenoids(1)
作者:R. Verné、N. De Kimpe、L. De Buyck、W. Steurbaut、M. Sadones、R. Willaert、J. -P. Verbeek、N. Schamp
DOI:10.1002/bscb.19800890607
日期:——
AbstractSeveral dehydrorotenoids have been prepared by thermal condensation of 4‐ethoxycarbonyl‐3‐chromanon derivatives with 4‐hydroxybenzofurans and 2,2‐dimethyl‐5‐hydroxychroman. Hydrogenation of the dehydrorotenoids in the presence of Pd/BaSO4 afforded rotenoids.
Pfeiffer; Bauer, Chemische Berichte, 1947, vol. 80, p. 7,18
作者:Pfeiffer、Bauer
DOI:——
日期:——
Pfeiffer; Enders, Chemische Berichte, 1951, vol. 84, p. 247,252
作者:Pfeiffer、Enders
DOI:——
日期:——
Rotenone. XXVI. Synthesis of the Parent Substances of Some Characteristic Rotenone Derivatives