According to one aspect of the present invention, there is provided a composition for film formation, comprising a compound represented by general formula (I) or a hydrolyzed-dehydrocondensation product thereof:
X
1
3-m
R
1
m
SiR
2
SiR
3
n
X
2
3-n
(I)
wherein R
1
and R
3
represent a hydrogen atom or a monovalent substituent; R
2
represents a divalent group having an alicyclic structure with four carbon atoms or a derivative of the divalent group; X
1
and X
2
represent a hydrolysable group; and m and n are an integer of from 0 to 2.
根据本发明的一个方面,提供了一种用于膜形成的组合物,包括以下公式(I)所代表的化合物或其
水解-脱缩聚产物:X13-mR1mSiR2SiR3nX23-n(I),其中R1和R3代表氢原子或一价取代基;R2代表具有四个碳原子的脂环结构的二价基团或其衍
生物;X1和X2代表可
水解的基团;m和n为0至2的整数。