Novel sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process
申请人:——
公开号:US20040166432A1
公开(公告)日:2004-08-26
A chemical amplification type resist composition comprising a specific sulfonyldiazomethane containing long-chain alkoxyl groups has many advantages including improved resolution, improved focus latitude, minimized line width variation or shape degradation even on long-term PED, minimized debris left after coating, development and peeling, and improved pattern profile after development and is thus suited for microfabrication.
一种化学放大型抗蚀组合物,包括具有长链烷氧基基团的特定磺酰二氮甲烷,具有许多优点,包括改善分辨率、改善焦点宽度、即使在长期PED上也减少线宽变化或形状退化、涂覆、显影和剥离后减少残留的碎屑,并在显影后改善图案轮廓,因此适用于微细加工。