Mixed carbocycle derivatives containing at least two carbocycles per molecule from the group of anthracenes, adamantanes and steroids with functionalized carbon chains are synthesized and used as modifiers of resist properties and especially etch resistance enhancement and absorption characteristics. These derivatives are characterized by formulas I-V, where A and R may be an anthryl- and/or an adamantyl- and/or a steroid moiety. Methods for the preparation of the above compounds are disclosed.
本发明涉及一种混合的碳环衍
生物,每个分子中含有至少两个来自
蒽、
金刚烷和类
固醇的碳环,并具有功能化碳链,用作改性剂以增强电阻特性,特别是增强蚀刻抗性和吸收特性。这些衍
生物的特点是式I-V,其中A和R可以是
蒽基、
金刚烷基和/或类
固醇基团。公开了制备上述化合物的方法。