An electrodeposition composition comprising: (a) a source of copper ions; (b) an acid; (c) a suppressor, and (d) a leveler, wherein the leveler comprises a quaternized dipyridyl compound prepared by reacting a dipyridyl compound with a difunctional alkylating agent or a quaternized poly(epihalohydrin). The electrodeposition composition can be used in a process for forming a copper feature over a semiconductor substrate in wafer level packaging to electrodeposit a copper bump or pillar on an underbump structure of a semiconductor assembly.
一种电沉积组合物,包括:(a)
铜离子源;(b) 酸;(c)
抑制剂和 (d) 匀染剂,其中匀染剂包括通过二官能团烷基化剂或季
铵化聚表卤醇反应制备的季
铵化二
吡啶基化合物。 电沉积组合物可用于在晶圆级封装的半导体衬底上形成
铜特征的工艺中,以在半导体组件的凸块下结构上电沉积
铜凸块或
铜柱。