Compositions, coatings and films for tri-layer patterning applications and methods of preparation thereof
申请人:Kennedy Joseph
公开号:US20080206690A1
公开(公告)日:2008-08-28
Compositions for use in tri-layer applications are described herein, wherein the composition has a matrix and includes: a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, at least one condensation catalyst, and at least one solvent. Tri-layer structures are also contemplated herein that comprise an organic underlayer (first layer), antireflective compositions and/or films contemplated herein (second layer) and a photoresist material (third layer) that are coupled to one another. Methods of producing a composition for tri-layer patterning applications includes: providing a formulated polymer comprising at least one type of silicon-based moiety forming the matrix of the polymer, a plurality of vinyl groups coupled to the matrix of the polymer, and a plurality of phenyl groups coupled to the matrix of the polymer, providing at least one condensation catalyst, providing at least one solvent, providing at least one pH modifier, blending the formulated polymer and part of the at least one solvent in a reaction vessel to form a reactive mixture; and incorporating the at least one pH modifier, the at least one condensation catalyst and the remaining at least one solvent into the reactive mixture to form the composition.
本文描述了用于三层应用的组合物,其中该组合物具有一个基质,包括:一种经过配制的聚合物,该聚合物的基质包含至少一种硅基基团,与基质相偶联的多个乙烯基和多个苯基,至少一种缩合催化剂和至少一种溶剂。本文还考虑了三层结构,包括有机底层(第一层)、反射率组合物和/或膜(第二层)以及与其相偶联的光阻材料(第三层)。制备用于三层图案应用的组合物的方法包括:提供一种经过配制的聚合物,该聚合物的基质包括至少一种硅基基团,与基质相偶联的多个乙烯基和多个苯基,提供至少一种缩合催化剂,提供至少一种溶剂,提供至少一种pH调节剂,将经过配制的聚合物和至少一部分溶剂混合在反应容器中形成反应混合物;并将至少一种pH调节剂、至少一种缩合催化剂和剩余的至少一种溶剂混入反应混合物中形成组合物。