申请人:ICHIKAWA Koji
公开号:US20100304294A1
公开(公告)日:2010-12-02
A salt represented by the formula (I-AA):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C4 perfluoroalkyl group,
X
1
represents a single bond etc.,
Y
1
represents a C1-C36 aliphatic hydrocarbon group etc.,
A
1
and A
2
independently each represents a C1-C20 aliphatic hydrocarbon group etc.,
Ar
1
represents a (m
4
+1)-valent C6-C20 aromatic hydrocarbon group which can have one or more substituents,
B
1
represents a single bond etc.,
m
1
and m
2
independently each represents an integer of 0 to 2, m
3
represents an integer of 1 to 3, with the proviso that m
1
plus m
2
plus m
3
equals 3, and m
4
represents an integer of 1 to 3, and a photoresist composition comprising the salt represented by the formula (I-AA) and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
公式(I-AA)表示的盐,其中Q1和Q2各自独立代表一个氟原子或一个C1-C4全氟烷基团,X1代表一个单一键等,Y1代表一个C1-C36脂肪烃团等,A1和A2各自独立代表一个C1-C20脂肪烃团等,Ar1代表一个(m4+1)价的C6-C20芳香烃团,该团可以有一个或多个取代基,B1代表一个单一键等,m1和m2各自独立代表一个从0到2的整数,m3代表一个从1到3的整数,条件是m1加上m2加上m3等于3,m4代表一个从1到3的整数,以及包含由公式(I-AA)表示的盐的光阻剂组合物,以及包含具有酸不稳定基团且在碱性水溶液中不溶或微溶但在酸作用下变得可溶的结构单元的树脂。