A highly convenient universal method for trimethylsilylation of acetylenicalcohols and glycols via treatment by hexamethyldisilazane in the presence of benzoic acid sulphimide as a catalyst has been developed. The rate of trimethylsilylation of acetylenicalcohols is reduced from primary to secondary and to tertiary alcohols accordingly, as well as with the decreasing of hydroxyl nucleophylicity.