HYPERBRANCHED POLYMER SYNTHESIZING METHOD, HYPERBRANCHED POLYMER, RESIST COMPOSITION, SEMICONDUCTOR INTEGRATED CIRCUIT, AND SEMICONDUCTOR INTEGRATED CIRCUIT FABRICATION METHOD
申请人:Tanaka Yuko
公开号:US20110198730A1
公开(公告)日:2011-08-18
A method of synthesizing a hyperbranched polymer by living radical polymerization of a monomer in the presence of a metal catalyst includes at least adding a compound or setting the amount of the monomer in the living radical polymerization. The compound added is at least a compound represented by R
1
-A or a compound represented by R
2
—B—R
3
, where R
1
denotes hydrogen, an alkyl group (1-10 carbons), aryl group (1-10 carbons), or aralkyl group (7-10 carbons), A denotes a cyano group, hydroxyl group, or nitro group, R
2
and R
3
denote hydrogen, alkyl groups (1-10 carbons), aryl groups (6-10 carbons), aralkyl groups (7-10 carbons), or dialkylamino groups (2-10 carbons), and B denotes a carbonyl group or sulfonyl group. Setting of the monomer amount includes setting the amount of monomer to be mixed into a reaction system at one mixing to be less than the total monomer to be mixed with the reaction system.
在金属催化剂的存在下,通过活性自由基聚合合成超支化聚合物的方法,至少包括添加化合物或调整活性自由基聚合中单体的量。添加的化合物至少是由R1-A表示的化合物或由R2-B-R3表示的化合物,其中R1表示氢、烷基(1-10个碳)、芳基(1-10个碳)或芳基烷基(7-10个碳),A表示氰基、羟基或硝基,R2和R3表示氢、烷基(1-10个碳)、芳基(6-10个碳)、芳基烷基(7-10个碳)或二烷基氨基基团(2-10个碳),B表示羰基或磺酰基。单体量的调整包括将单体的量设置为在一次混合中混合到反应体系中的单体总量以下。