RESIST COMPOSITION, PATTERN FORMING METHOD, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE
申请人:FujiFilm Corporation
公开号:US20190219922A1
公开(公告)日:2019-07-18
There is provided a resist composition containing a resin. The resin includes a repeating unit (a) having one or more *—OY
0
groups substituted for an aromatic ring; and a phenolic hydroxyl group (b) or a partial structure (c) represented by Formula (X). Here, the *—OY
0
group is a group that is decomposed due to an action of an acid to generate a phenolic hydroxyl group, and Y
0
is a specific protective group. In a case where the repeating unit (a) includes none of the phenolic hydroxyl group (b) and the partial structure (c), the repeating unit (a) is a repeating unit in which the *—OY
0
group is decomposed due to an action of an acid to generate two or more phenolic hydroxyl groups.