A process of making naphthoquinone diazide esters using lactone solvents
申请人:HOECHST CELANESE CORPORATION
公开号:EP0488686A1
公开(公告)日:1992-06-03
A method of preparing a photosensitizer condensate comprising: condensing a phenolic compound with a diazo sulfonyl chloride, wherein from about 50 to 100 mole percent of the diazo moiety is 2,1,4-diazo and from 0 to about 50 mole percent of the diazo moiety is 2,1,5 diazo; the phenolic compound having, on average, from about 60 mole percent to about 100 mole percent of its hydroxy groups esterified by the diazo sulfonyl chloride; wherein the condensing is conducted in a lactone solvent in the presence of an acid scavenger; and then subsequently isolating the photosensitizer condensate.
Phenolic resins and photoresist compositions comprising same
申请人:Shipley Company LLC
公开号:EP1035438A2
公开(公告)日:2000-09-13
The invention provides these novel resins and photoresist compositions that comprise a photoactive component and one or more resins of the invention. In one aspect, resins of the invention can be characterized by use of a prepolymer reagent that is a reaction product of a methylol phenol compound. The methylol phenol compound is suitably reacted at above room temperature and/or in the presence of acid.