中文名称 | 英文名称 | CAS号 | 化学式 | 分子量 |
---|---|---|---|---|
—— | tris(3,5-di-tert-butoxycarbonyloxybenzyl)-1,3,5-benzene-tricarboxylic acid | 364729-34-0 | C60H72O24 | 1177.22 |
PROBLEM TO BE SOLVED: To provide a compound for resists which can be used not only for ultraviolet rays such as i-line and g-line but also for radiation such as an excimer laser beam including KrF, an electron beam, and X-rays, and a radiation sensitive composition containing the same.
SOLUTION: The compound is represented by the formula (wherein R
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