CLEANING LIQUID FOR SEMICONDUCTOR DEVICE SUBSTRATES AND METHOD OF CLEANING SUBSTRATE FOR SEMICONDUCTOR DEVICES
申请人:MITSUBISHI CHEMICAL CORPORATION
公开号:US20130174867A1
公开(公告)日:2013-07-11
The invention relates to a cleaning liquid for semiconductor device substrates comprising the following components (A) to (D) and a method of cleaning semiconductor device substrates:
(A) at least either one of a polycarboxylic acid and a hydroxycarboxylic acid;
(B) a sulfonic acid type anionic surfactant;
(C) a carboxylic acid type anionic surfactant; and
(D) water.