There is provided a radiation sensitive composition including a siloxane polymer exhibiting phenoplast crosslinking reactivity as a base resin, which is excellent in resolution and can be used as a radiation sensitive composition capable of allowing a pattern having a desired-shape to be formed with sufficient precision. A radiation sensitive composition comprising as a silane, a hydrolyzable silane, a hydrolysis product thereof, or a hydrolysis-condensation product thereof; and a photoacid generator, in which the hydrolyzable silane includes hydrolyzable silanes of Formula (1)
R1aR2bSi(R3)4-(a+b) Formula (1)
wherein R1 is an organic group of Formula (1-2)
and is bonded to a silicon atom through a Si-C bond or a Si-O bond, and R3 is a hydrolyzable group; and Formula (2)
R7cR8dSi(R9)4-(c+d) Formula (2)
wherein R7 is an organic group of Formula (2-1)
, and is bonded to a silicon atom through a Si-C bond or a Si-O bond, and R9 is a hydrolyzable group.
本发明提供了一种辐射敏感性组合物,该组合物包括一种
硅氧烷聚合物,该聚合物作为基础
树脂具有
酚醛交联反应活性,具有优异的分辨率,可用作辐射敏感性组合物,能够以足够的精度形成具有所需形状的图案。一种辐射敏感性组合物,包括
硅烷、可
水解
硅烷、其
水解产物或其
水解缩合产物;以及光酸发生器,其中可
水解
硅烷包括式(1)的可
水解
硅烷
R1aR2bSi(R3)4-(a+b) 式(1)
其中 R1 是式 (1-2) 的有机基团
并通过 Si-C 键或 Si-O 键与
硅原子结合,R3 是可
水解基团;以及式(2)
R7cR8dSi(R9)4-(c+d) 式(2)
其中 R7 是式 (2-1) 的有机基团
通过 Si-C 键或 Si-O 键与
硅原子结合,R9 是可
水解基团。