[DE] DICARBONSÄUREN FÜR DIELEKTRIKA MIT SPERRWIRKUNG GEGEN KUPFERDIFFUSION [EN] DICARBOXYLIC ACIDS FOR DIELECTRICS WITH BARRIER EFFECT AGAINST COPPER DIFFUSION [FR] ACIDES DICARBOXYLIQUES DESTINES A DES DIELECTRIQUES PRESENTANT UNE FONCTION DE BARRIERE CONTRE LA DIFFUSION DU CUIVRE
Precursor of a heat resistant resin, heat resistant resin, insulating film and semiconductor device
申请人:——
公开号:US20020013443A1
公开(公告)日:2002-01-31
A precursor of a polybenzoxazole resin which comprises a crosslinking group in a molecule and has a specific structure, a polybenzoxazole resin obtained from the precursor by the condensation reaction and the crosslinking reaction, an insulating film comprising the polybenzoxazole resin and a semiconductor device comprising an insulating interlayer film in multi-layer wiring or a film for protecting surfaces which comprises the above insulating film.
The precursor exhibits excellent processability due to excellent solubility in solvents and, after the ring closure, excellent heat stability in applications. The resin exhibits excellent electric, physical and mechanical properties and is advantageously used for insulating interlayer films of semiconductor devices and the like applications.
Material for an insulating film, coating varnish for an insulating film, and insulating film and semiconductor device using the same
申请人:——
公开号:US20040002572A1
公开(公告)日:2004-01-01
A material for an insulating film which comprises a copolymer obtained by reacting a polyamide having a specific structure and a reactive oligomer as a component forming the film; a coating varnish for an insulating film which comprises this material and an organic solvent; an insulating film which comprises a layer of a resin comprising as a main structure a polybenzoxazole which is obtained by treating the above material or the above coating varnish by heating so that condensation reaction and crosslinking reaction take place and has fine pores; and a semiconductor device which comprises an insulating interlayer film for multi-layer wiring comprising the insulating film and/or a surface protective film comprising the insulating film. Excellent electrical, thermal and mechanical properties are exhibited and a low permittivity can be achieved.
RESIN COMPOSITION, VARNISH, RESIN FILM AND SEMICONDUCTOR DEVICE USING THE SAME
申请人:Fujita Kazuyoshi
公开号:US20090118431A1
公开(公告)日:2009-05-07
A main object of the present invention is to provide a resin composition having high heat resistance and a low dielectric constant, a varnish thereof, a resin film thereof and a semiconductor device using the same.
In the present invention, the object is achieved by a resin composition comprising a compound having a structure represented by formula (1) and a crosslinking agent:
wherein in formula (1), R
0
is a single bond or has a structure represented by formula (2); R
1
to R
8
are respectively any of hydrogen, a group having an alicyclic structure, an organic group having 1 to 10 carbon atoms other than the group having an alicyclic structure, a hydroxyl group and a carboxyl group; and “X” is any of —O—, —NHCO—, —CONH—, —COO— and —OCO—; further, wherein in formula (2), “Ar” is an aromatic group; “Y” is any of a single bond —O—, —S—, —OCO— and —COO—; “q” is an integer of 1 or more; R
9
is hydrogen or an organic group having 1 or more carbon atoms and may be identical with or different from each other when “q” is an integer of 2 or more; at least one of R
1
to R
8
is the group having an alicyclic structure when R
0
is a single bond; at least one of R
1
to R
9
is the group having an alicyclic structure when R
0
has the structure represented by formula (2); and “*” and “**” represent a position to be bonded to a different chemical structure.
Benzoxazole Resin Precursor, Polybenzoxazole Resin, Resin Film And Semiconductor Device
申请人:Enoki Takashi
公开号:US20080206548A1
公开(公告)日:2008-08-28
A benzoxazole resin precursor comprising a first repeating unit which is obtained by the reaction of a bisaminophenol compound and a dicarboxylic acid compound, at least one of which has the diamondoid structure; a benzoxazole resin precursor further comprising a second repeating unit which is obtained by the reaction of a bisaminophenol compound having no diamondoid structure and a dicarboxylic acid compound having no diamondoid structure; a polybenzoxazole resin obtained by the ring-closing reaction with dehydration of the above benzoxazole resin precursor; a resin film constituted with the benzoxazole resin precursor or the polybenzoxazole resin. A polybenzoxazole resin and a resin film having excellent heat resistance and a small permittivity and a semiconductor device using the resin film can be obtained from the benzoxazole resin precursor.
Resin Composition, Polyimide Resin Composition, Polybenzoxazole Resin Composition, Varnish, Resin Film and Semiconductor Device Using the Same
申请人:Enoki Takashi
公开号:US20080255335A1
公开(公告)日:2008-10-16
A resin composition having high heat resistance and low dielectric constant after heat treatment, a varnish thereof and a semiconductor device using the same are provided by a resin composition including a compound having a structure represented by the general formula (1):
wherein, “Ar” is an aromatic group; “a” is 0 or 1; R
11
is an organic group having one or more carbon atoms and at least one is a group having an alicyclic structure; when “q” is an integer of 2 or more, R
11
s may be the same or different from each other; at least one of R
1
to R
5
and at least one of R
6
to R
10
on respective benzene rings are Ar-binding sites or R
11
-binding sites and the others of R
1
to R
5
and R
6
to R
10
are each hydrogen, a group having an alicyclic structure, an organic group having 1 to 10 carbon atoms, a hydroxyl group or a carboxyl group; when “a” is 0, at least one of R
1
to R
5
and R
6
to R
10
is a group having an alicyclic structure; “q” is an integer of 1 or more; and “X” is any of —O—, —NHCO—, —COHN—, —COO— and —OCO—.