申请人:JSR Corporation
公开号:EP1679314A1
公开(公告)日:2006-07-12
A novel polysiloxane suitable as a resin component of a chemically-amplified resist exhibiting particularly excellent I-D bias, depth of focus (DOF), and the like, a novel silane compound useful as a raw material for synthesizing the polysiloxane, and a radiation-sensitive resin composition comprising the polysiloxane are provided.
The silane compound is shown by the following formula (I),
and the polysiloxane has a structural unit shown by the following formula (1),
wherein R is an alkyl group, R1 and R2 individually represent a fluorine atom, lower alkyl group, or lower fluoroalkyl group, n is 0 or 1, k is 1 or 2, and i is an integer of 0 to 10.
The radiation-sensitive resin composition comprises the polysiloxane and a photoacid generator.
本发明提供了一种适用于作为化学放大抗蚀剂的树脂成分的新型聚硅氧烷,该抗蚀剂具有特别优异的 I-D 偏压和焦深(DOF)等性能;一种可用作合成该聚硅氧烷的原料的新型硅烷化合物;以及一种包含该聚硅氧烷的辐射敏感树脂组合物。
硅烷化合物如下式(I)所示、
而聚硅氧烷具有下式(1)所示的结构单元、
其中 R 是烷基,R1 和 R2 分别代表氟原子、低级烷基或低级氟烷基,n 是 0 或 1,k 是 1 或 2,i 是 0 至 10 的整数。
辐射敏感树脂组合物包括聚硅氧烷和光酸发生器。