申请人:——
公开号:US20030129531A1
公开(公告)日:2003-07-10
The present invention relates to a novel absorbing, photoimageable and aqueous developable positive-working antireflective coating composition comprising a photoacid generator and a polymer comprising at least one unit with an acid labile group and at least one unit with an absorbing chromophore. The invention further relates to a process for using such a composition. The present invention also relates to a novel absorbing, photoimageable and aqueous alkali developable positive-working antireflective coating composition comprising a polymer comprising at least one unit with an acid labile group, a dye and a photoacid generator. The invention further relates to a process for using such a composition. The invention also relates to a novel process for forming a positive image with a positive photoresist and a novel photoimageable and aqueous developable positive-working antireflective coating composition, where the antireflective coating comprises a polymer comprising an acid labile group. The invention further relates to such a composition. The invention also relates to a process for imaging a photoimageable antireflective coating composition.
本发明涉及一种新型的可吸收、可光成像和可水性显影的正工作抗反射涂层组合物,该组合物包含一种光酸发生器和一种聚合物,该聚合物包含至少一个具有酸标签基团的单元和至少一个具有吸收发色团的单元。本发明还涉及使用这种组合物的工艺。本发明还涉及一种新型的可吸收、可光成像和水性碱显影的正工作抗反射涂层组合物,该组合物包含至少一个具有酸标签基团的单元、染料和光酸发生器的聚合物。本发明还涉及使用这种组合物的工艺。本发明还涉及一种用正性光刻胶和一种新颖的可光成像和可水性显影的正性工作抗反射涂层组合物形成正性图像的新工艺,其中抗反射涂层包括一种含有酸标签基团的聚合物。本发明还涉及这样一种组合物。本发明还涉及一种可光成像的防反射涂层组合物的成像工艺。