申请人:——
公开号:US20030119957A1
公开(公告)日:2003-06-26
A resist composition showing excellent close adherence at the interface of a substrate and a resist, improving problems in wet etching, having excellent sensitivity and resolution, and also showing excellent resist performances, and comprising a compound of the general formula (I):
1
wherein, R
1
and R
2
represent each independently a hydrogen atom or an alkyl group, R
3
represents a hydrogen atom, alkyl group, aryl group, aralkyl group, alkenyl group, alkylcarbonyl group, arylcarbonyl group or aralkylcarbonyl group, n represents an integer of 1 to 40, m represents an integer of 1 to 5, and l represents an integer of 1 to 5, is provided.
提供了一种抗性组合物,该组合物在基底和抗性之间的界面处表现出优异的紧密粘附性,改善了湿法蚀刻的问题,具有优异的敏感度和分辨率,并且展现出优异的抗性能力,包括一般式(I)的化合物:
其中,R1和R2各自独立地代表氢原子或烷基,R3代表氢原子、烷基、芳基、芳基烷基、烯基、烷基羰基、芳基羰基或芳基烷基羰基,n表示1到40的整数,m表示1到5的整数,l表示1到5的整数。