The present invention provides a polishing composition having a high polishing speed and a low etching speed and capable of achieving sufficient flattening.
The present invention is a polishing composition containing abrasive grains, an oxidizing agent, an acid, an anticorrosive containing a compound represented by the following formula (1) or a salt thereof, and a dispersing medium.
(In the formula (1), R1 is a linear or branched alkyl group having 6 or more and 30 or less carbon atoms or a linear or branched alkenyl group having 6 or more and 30 or less carbon atoms, R2 is a single bond or an alkylene group having 1 or more and 4 or less carbon atoms, and R3 is a hydrogen atom or a linear or branched alkyl group having 1 or more and 10 or less carbon atoms.)
本发明提供了一种抛光组合物,它具有较高的抛光速度和较低的蚀刻速度,并能达到足够的平整度。
本发明是一种抛光组合物,含有磨粒、氧化剂、酸、含有下式(1)代表的化合物或其盐的
防腐剂和分散介质。
(在式 (1) 中,R1 是具有 6 个或更多和 30 个或更少碳原子的直链或支链烷基,或具有 6 个或更多和 30 个或更少碳原子的直链或支链烯基,R2 是单键或具有 1 个或更多和 4 个或更少碳原子的亚烷基,R3 是氢原子或具有 1 个或更多和 10 个或更少碳原子的直链或支链烷基)。