申请人:Kashima Yoshiyuki
公开号:US20080115423A1
公开(公告)日:2008-05-22
The present invention relates to a polishing composition for silicon wafer comprising silica; a basic compound; at least one compound selected from the group consisting of amino acid derivatives represented by formula (1)
wherein R
1
, R
2
and R
3
are identical or different one another, C
1-12
alkylene group that may be substituted by hydroxyl group, carboxyl group, phenyl group or amino group, and formula (2)
wherein R
4
and R
5
are identical or different each other, hydrogen atom, or C
1-12
alkyl group that may be substituted by hydroxyl group, carboxyl group, phenyl group or amino group, with a proviso that both R
4
and R
5
are not hydrogen at the same time, and R
6
is C
1-12
alkylene group that may be substituted by hydroxyl group, carboxyl group, phenyl group or amino group, and the salts of the amino acid derivatives; and water. The polishing composition can prevent metal contamination, particularly copper contamination in polishing of silicon wafer.