NOVEL COMPOUND, POLYMER, CROSS-LINKED COMPOUND OF POLYMER, AND OPTICAL ELEMENT INCLUDING CROSS-LINKED COMPOUND
申请人:Okada Seiji
公开号:US20140163175A1
公开(公告)日:2014-06-12
Conventional cross-linked cyclic olefin polymers do not have a sufficiently low linear expansion coefficient.
A compound having a structure represented by the following formula (a).
传统的交联环烯聚合物的线性膨胀系数不够低。具有以下公式(a)表示的结构的化合物。
GAP-FILL METHODS
申请人:Rohm and Haas Electronic Materials LLC
公开号:US20150132921A1
公开(公告)日:2015-05-14
Provided are gap-fill methods. The methods comprise: (a) providing a semiconductor substrate having a relief image on a surface of the substrate, the relief image comprising a plurality of gaps to be filled; (b) applying a gap-fill composition over the relief image, wherein the gap-fill composition comprises a self-crosslinkable polymer and a solvent, wherein the self-crosslinkable polymer comprises a first unit comprising a polymerized backbone and a crosslinkable group pendant to the backbone; and (c) heating the gap-fill composition at a temperature to cause the polymer to self-crosslink. The methods find particular applicability in the manufacture of semiconductor devices for the filling of high aspect ratio gaps.
Provided are gap-fill methods. The methods comprise: (a) providing a semiconductor substrate having a relief image on a surface of the substrate, the relief image comprising a plurality of gaps to be filled; (b) applying a gap-fill composition over the relief image, wherein the gap-fill composition comprises a self-crosslinkable polymer and a solvent, wherein the self-crosslinkable polymer comprises a first unit comprising a polymerized backbone and a crosslinkable group pendant to the backbone; and (c) heating the gap-fill composition at a temperature to cause the polymer to self-crosslink. The methods find particular applicability in the manufacture of semiconductor devices for the filling of high aspect ratio gaps.
Compound, polymer, cross-linked compound of polymer, and optical element including cross-linked compound
申请人:Okada Seiji
公开号:US09243098B2
公开(公告)日:2016-01-26
Conventional cross-linked cyclic olefin polymers do not have a sufficiently low linear expansion coefficient. A compound having a structure represented by the following formula (a).