Copolymer for positive type lithography, polymerization initiator used in production of said copolymer, and composition for semiconductor lithography
申请人:Iijima Minoru
公开号:US20120071638A1
公开(公告)日:2012-03-22
A copolymer for positive type lithography, having at least a recurring unit (A) having a structure wherein an alkali-soluble group is protected by an acid-dissociating, dissolution-suppressing group, represented by the following formula (A)
[in the formula (A), R
10
is a hydrogen atom or a hydrocarbon group which may be substituted by fluorine atom; R
11
is a crosslinked, alicyclic hydrocarbon group; n is an integer of 0 or 1; and R
12
is an acid-dissociating, dissolution-suppressing group], and a terminal structure (B) having a structure wherein an alkali-soluble group is protected by an acid-dissociating, dissolution-suppressing group, represented by the following formula (B)
[in the formula (B), R
21
is a hydrocarbon group which may contain nitrogen atom; R
22
is an acid-dissociating, dissolution-suppressing group; and p is a site of bonding with copolymer main chain].
一种用于正式光刻的共聚物,至少具有一个重复单元(A),其具有以下结构,其中一种碱溶性基团由酸解离、抑制溶解的基团保护,表示为以下公式(A)[在公式(A)中,R10是氢原子或可被氟原子取代的碳氢基团;R11是交联的脂环烃基团;n是0或1的整数;R12是酸解离、抑制溶解的基团],以及一个端基结构(B),其具有以下结构,其中一种碱溶性基团由酸解离、抑制溶解的基团保护,表示为以下公式(B)[在公式(B)中,R21是可能含有氮原子的碳氢基团;R22是酸解离、抑制溶解的基团;p是与共聚物主链结合的位置]。