CYCLIC COMPOUND, PRODUCTION PROCESS THEREOF, RADIATION-SENSITIVE COMPOSITION AND RESIST PATTERN FORMATION METHOD
申请人:Takasuka Masaaki
公开号:US20120282546A1
公开(公告)日:2012-11-08
Disclosed are: a cyclic compound which has high solubility in a safe solvent, is highly sensitive, enables the formation of a resist pattern having a good shape, and rarely causes resist pattern collapse; a process for producing the cyclic compound; a radiation-sensitive composition containing the cyclic compound; and a resist pattern formation method using the composition. Specifically disclosed are: a cyclic compound having a specific structure; a process for producing the cyclic compound; a radiation-sensitive composition containing the compound; and a resist pattern formation method using the composition.
本发明涉及一种具有高溶解度、高灵敏度、能够形成良好形状的抗蚀图案,且很少引起抗蚀图案崩塌的环状化合物;一种制备该环状化合物的方法;一种含有该环状化合物的辐射敏感组合物;以及使用该组合物的抗蚀图案形成方法。具体揭示了一种具有特定结构的环状化合物,制备该环状化合物的方法,含有该化合物的辐射敏感组合物以及使用该组合物的抗蚀图案形成方法。