LIQUID COMPOSITION CONTAINING AMINOETHER FOR DEPOSITION OF METAL-CONTAINING FILMS
申请人:Ivanov Sergei Vladimirovich
公开号:US20110212629A1
公开(公告)日:2011-09-01
A formulation, comprising: a) at least one metal-ligand complex, wherein one or more ligands are selected from the group consisting of β-diketonates, β-ketoiminates, β-ketoesterates, β-diiminates, alkyls, carbonyls, alkyl carbonyls, cyclopentadienyls, pyrrolyls, alkoxides, amidinates, imidazolyls, and mixtures thereof; and the metal is selected from Group 2 to 16 elements of the Periodic Table of the Elements; and, b) at least one aminoether selected from the group consisting of R
1
R
2
NR
3
OR
4
NR
5
R
6
, R
1
OR
4
NR
5
R
6
, O(CH
2
CH
2
)
2
NR
1
, R
1
R
2
NR
3
N(CH
2
CH
2
)
2
O, R
1
R
2
NR
3
OR
4
N(CH
2
CH
2
)
2
O, O(CH
2
CH
2
)
2
NR
1
OR
2
N(CH
2
CH
2
)
2
O, and mixtures thereof, wherein R
1-6
are independently selected from group consisting of C
1-10
linear alkyl, C
1-10
branched alkyl, C
1-10
cyclic alkyl, C
6
-C
10
aromatic, C
1-10
alkylamine, C
1-10
alkylaminoalkyl, C
1-10
ether, C
4
-C
10
cyclic ether, C
4
-C
10
cyclic aminoether, and mixture thereof.